Difficulties in deducing disordering mechanisms from experimental studies of disorder-ion fluence functions in ion irradiation of semiconductors

Author:

Webb R.,Carter G.

Publisher

Informa UK Limited

Subject

General Engineering

Reference12 articles.

1. Swanson, M. L., Parsons, J. R. and Hoelke, C. W.Rad. Effects in Semiconductors, Edited by: Corbett and Watkins. 349London: Gordon and Breach Ltd.

2. Energy spike generation and quenching processesin ion bombardment induced amorphizationof solids

3. Criteria for bombardment-induced structural changes in non-metallic solids

4. Effect of irradiation temperature on Si amorphization process

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