A scaled sigmund theory model for determining sputter ratios
Author:
Affiliation:
1. a Oak Ridge National Laboratory , Oak Ridge, Tennessee, 37831-6368
2. b Graduate student, Vanderbilt University , Nashville, Tennessee
3. c Undergraduate student, Loyola University , New Orleans, Louisiana
Publisher
Informa UK Limited
Subject
Condensed Matter Physics,General Materials Science,Nuclear and High Energy Physics,Radiation
Link
https://www.tandfonline.com/doi/pdf/10.1080/10420159308219736
Reference18 articles.
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5. Sputtering-yield studies on silicon and silver targets
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1. Dependence on size and curvature of sputtering yield in nanowires;Applied Surface Science;2018-07
2. Simulation of ballistic effects during scattering under glancing angles of incidence from crystal surfaces;Surface Science;1996-02
3. Sources of Low-Charge-State Positive-Ion Beams1 1Research was sponsored by the U.S. Department of Energy under Contract No. DE-AC05-84OR21400 with Martin Marietta Energy Systems, Inc.;Methods in Experimental Physics;1995
4. Design features of a high‐intensity, cesium‐sputter/plasma‐sputter negative ion sourcea);Review of Scientific Instruments;1994-06
5. High‐intensity, heavy negative ion sources based on the sputter principle (invited);Review of Scientific Instruments;1994-04
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