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Theory of sputtering and comparison to experimental data

Published:1982-03 Issue:1-3 Volume:194 Page:515-522
ISSN:0167-5087
Container-title:Nuclear Instruments and Methods in Physics Research
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research

Author:

Yamamura Y.

Publisher

Elsevier BV

Subject

General Engineering

Reference29 articles.

1. Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

2. Sputtering and backscattering of keV light ions bombarding random targets

3. The energy dependence of gold selfsputtering

4. Sputtering-yield studies on silicon and silver targets

5. Energy density and time constant of heavy‐ion‐induced elastic‐collision spikes in solids

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