Ion-beam processing of hydrogenated amorphous silicon carbide grown by plasma-enhanced chemical vapour deposition-Reference-Cited by-同舟云学术

Ion-beam processing of hydrogenated amorphous silicon carbide grown by plasma-enhanced chemical vapour deposition

Published:2000-04 Issue:4 Volume:80 Page:539-546
ISSN:1364-2812
Container-title:Philosophical Magazine B
language:en
Short-container-title:Philosophical Magazine B

Author:

Calcagno L.¹,Giorgis F.²,Makhtari A.³,Musumeci P.¹,Reitano R.¹

Affiliation:

1. a Istituto Nazionale per la Fisica delia Materia and Dipartimento di Fisica , Corso Italia 57, Catania , Italy

2. b Istituto Nazionale di Fisica per la Materia and Dipartimento di Fisica, Politecnico di Torino , Corso Duca degli Abruzzi 24, 10129 , Torino , Italy

3. c Département de Physiaue , Universite Moulay Ismail , BP4010, Beni M'Hamed, Meknes , Morocco

Publisher

Informa UK Limited

Subject

General Physics and Astronomy,General Chemical Engineering

Link

https://www.tandfonline.com/doi/pdf/10.1080/13642810008209762

Reference18 articles.

1. Physics of Amorphous Silicon–Carbon Alloys

2. Spectroscopic characterization of annealed Si1−xCx films synthesized by ion implantation

3. Influence of hydrogen on the evolution of structural properties of amorphous silicon carbide

4. Thermal stability of a-Si1−xCx: H films grown by PECVD with different gas sources

5. Hydrogenated Amorphous Silicon Based Alloy: a-Si_1-xC_x:H

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Transition between amorphous and crystalline phases of SiC deposited on Si substrate using H3SiCH3;Journal of Crystal Growth;2009-09

2. PULSED LASER DEPOSITION OF CRYSTALLINE SILICON CARBIDE FILMS;Plasma Production by Laser Ablation;2004-10

3. Time-resolved studies of photoluminescence from proton irradiated and thermally annealed a-SiC:H alloys;SPIE Proceedings;2001-12-27

4. Crystallisation mechanism of amorphous silicon carbide;Applied Surface Science;2001-12

5. Silicon carbide: from amorphous to crystalline material;Applied Surface Science;2001-12