Variable EWMA run-to-run controller for drifted processes
Author:
Publisher
Informa UK Limited
Subject
Industrial and Manufacturing Engineering
Link
http://www.tandfonline.com/doi/pdf/10.1080/07408170600838431
Reference20 articles.
1. Supervisory run-to-run control of polysilicon gate etch using in situ ellipsometry
2. Run-to-Run Process Control: Literature Review and Extensions
3. A Unifying View of Some Process Adjustment Methods
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