Author:
TERAMOTO Akinobu,ARATANI Takashi,HIGUCHI Masaaki,IKENAGA Eiji,HIRAYAMA Masaki,SUGAWA Shigetoshi,HATTORI Takeo,OHMI Tadahiro
Publisher
The Vacuum Society of Japan
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics