Outgassing measurement of the aluminum alloy UHV chamber.-Reference-Cited by-同舟云学术

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Outgassing measurement of the aluminum alloy UHV chamber.

Published:1985 Issue:2 Volume:28 Page:87-90
ISSN:0559-8516
Container-title:SHINKU
language:
Short-container-title:SHINKU

Author:

MIYAMOTO Masao,ITOH Takao,KOMAKI Shojiro,NARUSHIMA Katsuya,ISHIMARU Hajime

Publisher

The Vacuum Society of Japan

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Surface Analysis of Surface Finished Aluminum Alloys with a Low Outgassing Property;Vacuum and Surface Science;2022-03-10

2. Outgassing Properties of Various Surface Finished Aluminum Alloy Measured by Extremely High Vacuum System;Vacuum and Surface Science;2021-09-10

3. Mass Spectrometry Analysis of Outgases from a Vacuum Equipment;Vacuum and Surface Science;2019-05-10

4. Outgassing Measurement for Vacuum Engineering;Journal of the Vacuum Society of Japan;2015

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