Outgassing Measurement for Vacuum Engineering
Author:
Affiliation:
1. ULVAC, Inc.
Publisher
The Vacuum Society of Japan
Subject
Spectroscopy,Surfaces and Interfaces,Instrumentation,General Materials Science
Reference34 articles.
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3. 3) S. S. Inayoshi, K. Saito, Y. Ikeda, Y. Yan and S. Tsukahara: Shinku, 36 (1993) 238.
4. 4) Y. Ishikawa: Shinku, 49 (2006) 335.
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