Fundamentals of Chemical Vapor Deposition Technologies
Author:
Affiliation:
1. Canon anelva corporation
Publisher
The Vacuum Society of Japan
Subject
Spectroscopy,Surfaces and Interfaces,Instrumentation,General Materials Science
Link
https://www.jstage.jst.go.jp/article/jvsj2/59/7/59_16-LC-011/_pdf
Reference17 articles.
1. 1) M. Suzuki: J. Vac. Soc. Jpn., 57 (2014) 303.
2. 3) S. Miyazaki: Oyo Butsuri, 69 (2000) 689.
3. 4) A. C. Jones and M. L. Hitchman (Ed.): Chemical Vapour Deposition Precursors, Processes and Applications (The Royal Society of Chemistry, Cambridge, UK, 2009).
4. 5) M. Tsuda, S. Oikawa, M. Morishita and M. Mashita: Jpn. J. Appl. Phys., 26 (1987) L564.
5. 6) J. Nishizawa and T. Kuramoto: Materia Japan, 43 (2004) 504.
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