10.3131/jvsj.48.633
Author:
Publisher
The Vacuum Society of Japan
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics
Reference5 articles.
1. Very‐low outgassing rate, separable, aluminum‐flanged, hot‐cathode ion source for a residual gas analyzer
2. Investigation and reduction of spurious peaks caused by electron-stimulated desorption and outgassing by means of a grid heating method in a hot-cathode quadrupole residual gas analyzer
3. Extremely low-outgassing material: 0.2% beryllium copper alloy
4. 5) 未発表. 真空誌に投稿予定.
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Highly hydrogen-sensitive thermal desorption spectroscopy system for quantitative analysis of low hydrogen concentration (∼1 × 1016 atoms/cm3) in thin-film samples;Review of Scientific Instruments;2017-05
2. Extreme High Vacuum Pumping System;Journal of the Vacuum Society of Japan;2013
3. New Measurement Method of Outgassing Speed with a Sealed off Residual Gas Analyzer;Journal of the Vacuum Society of Japan;2008
4. Copper Alloy Material for an Extreme High Vacuum Chamber and a Conflat-flange: 0.2%BeCu and 9%AlCu;SHINKU;2006
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