Improved productivity on diamond-like carbon coating optical disk stamper
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Published:2003
Issue:6
Volume:21
Page:2540
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:en
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Short-container-title:J. Vac. Sci. Technol. B
Author:
Ueng H. Y.,Guo C. T.
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
6 articles.
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