Field emission from diamond nanotips for scanning probe lithography-Reference-Cited by-同舟云学术

Field emission from diamond nanotips for scanning probe lithography

Published:2018-11 Issue:6 Volume:36 Page:06JL02
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Hofmann Martin¹,Lenk Claudia¹,Ivanov Tzvetan¹,Rangelow Ivo W.¹,Reum Alexander²,Ahmad Ahmad²,Holz Mathias²,Manske Eberhard³

Affiliation:

1. Technische Universität Ilmenau, MNES, IMNE, Gustav-Kirchhoff-Straße 1, 98693 Ilmenau, Germany

2. nano analytik GmbH, Ehrenbergstraße 1, 98693 Ilmenau, Germany

3. Technische Universität Ilmenau, PMS, Gustav-Kirchhoff-Straße 1, 98693 Ilmenau, Germany

Funder

Deutsche Forschungsgemeinschaft

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5048193

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