Deposition of indium nitride by low energy modulated indium and nitrogen ion beams
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.577763
Cited by 26 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Structure and bandgap determination of InN grown by RP-MOCVD;Journal of Materials Science: Materials in Electronics;2022-07-20
2. Elucidating the role of nitrogen plasma composition in the low-temperature self-limiting growth of indium nitride thin films;RSC Advances;2020
3. Low-temperature self-limiting atomic layer deposition of wurtzite InN on Si(100);AIP Advances;2016-04
4. Characterization of as-grown and adsorbate-covered N-polar InN surfaces using in situ photoelectron spectroscopy;physica status solidi (a);2011-11-18
5. Molecular-Beam Epitaxy of InN;Indium Nitride and Related Alloys;2009-08-18
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