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Superconformal coating and filling of deep trenches by chemical vapor deposition with forward-directed fluxes

  • Published:2018-09 Issue:5 Volume:36 Page:051513
  • ISSN:0734-2101
  • Container-title:Journal of Vacuum Science & Technology A
  • language:en
  • Short-container-title:Journal of Vacuum Science & Technology A

Author:

Talukdar Tushar K.12,Wang Wenjiao B.1,Girolami Gregory S.3,Abelson John R.1

Affiliation:

1. Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, 1304 W. Green St., Urbana, Illinois 61801

2. Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, 1206 W. Green St., Urbana, Illinois 61801

3. School of Chemical Sciences, University of Illinois at Urbana-Champaign, 600 South Mathews Avenue, Urbana, Illinois 61801

Funder

National Science Foundation

Semiconductor Research Corporation

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

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