Detailed molecular dynamics studies of block copolymer directed self-assembly: Effect of guiding layer properties-Reference-Cited by-同舟云学术

Detailed molecular dynamics studies of block copolymer directed self-assembly: Effect of guiding layer properties

Published:2013-11 Issue:6 Volume:31 Page:06F302
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Peters Andrew J.,Lawson Richard A.,Ludovice Peter J.,Henderson Clifford L.

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4821652

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3. Block copolymer directed self-assembly using chemoepitaxial guiding underlayers with topography;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2017-11

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