H2 and rare gas field ion source with high angular current-Reference-Cited by-同舟云学术

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H2 and rare gas field ion source with high angular current

Published:1979-11 Issue:6 Volume:16 Page:1875-1878
ISSN:0022-5355
Container-title:Journal of Vacuum Science and Technology
language:en
Short-container-title:Journal of Vacuum Science and Technology

Author:

Hanson Gary R.,Siegel Benjamin M.

Publisher

American Vacuum Society

Subject

General Engineering

Link

http://avs.scitation.org/doi/pdf/10.1116/1.570317

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