Tribological properties of thin films made by atomic layer deposition sliding against silicon-Reference-Cited by-同舟云学术

Tribological properties of thin films made by atomic layer deposition sliding against silicon

Published:2018-01 Issue:1 Volume:36 Page:01A122
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Kilpi Lauri,Ylivaara Oili M. E.,Vaajoki Antti,Liu Xuwen,Rontu Ville,Sintonen Sakari¹,Haimi Eero²,Malm Jari³,Bosund Markus⁴,Tuominen Marko⁵,Sajavaara Timo³,Lipsanen Harri¹,Hannula Simo-Pekka²,Puurunen Riikka L.⁶,Ronkainen Helena⁷

Affiliation:

1. Department of Electronics and Nanoengineering, Aalto University School of Electrical Engineering, P.O. Box 13500, FI-00076 Aalto, Finland

2. Department of Chemistry and Materials Science, Aalto University School of Chemical Engineering, P.O. Box 16100, FI-00076 Aalto, Finland

3. Department of Physics, University of Jyväskylä, P.O. Box 35, FI-40014 Jyväskylä, Finland

4. Beneq, Ltd., Ensimmäinen savu, FI-01510 Vantaa, Finland

5. ASM Microchemistry, Ltd., Pietari Kalmin katu 1 F 2, FI-00560 Helsinki, Finland

6. Department of Chemical and Metallurgical Engineering, Aalto University School of Chemical Engineering, P.O. Box 16100, FI-00076 Aalto, Finland and VTT Technical Research Centre of Finland, Ltd., P.O. Box 1000, FI-02044 VTT, Finland

7. VTT Technical Research Centre of Finland, Ltd., P.O. Box 1000, FI-02044 VTT, Finland

Funder

ASM Microchemistry Oy

Murata Electronics Oy

Okmetic Oy

Oxford Instruments Analytical Oy

Picosun Oy

Tekes

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics