Hardness, elastic modulus, and wear resistance of hafnium oxide-based films grown by atomic layer deposition-Reference-Cited by-同舟云学术

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Hardness, elastic modulus, and wear resistance of hafnium oxide-based films grown by atomic layer deposition

Published:2016-09 Issue:5 Volume:34 Page:051510
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Berdova Maria,Liu Xuwen,Wiemer Claudia,Lamperti Alessio,Tallarida Grazia,Cianci Elena,Fanciulli Marco,Franssila Sami

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4961113

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