Author:
Howard J. K.,Flitsch R.,Raider S. I.
Cited by
17 articles.
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1. Ion beam deposition in materials research;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1989-02
2. The Role of SiO in Si Oxidation at a Si-SiO2 Interface;The Physics and Chemistry of SiO2 and the Si-SiO2 Interface;1988
3. Process Dependence of the Si ‐ SiO2 Interface Trap Density for Thin Oxides;Journal of The Electrochemical Society;1987-11-01
4. Effects of Preoxidation Ambient in Very Thin Thermal Oxide on Silicon;Journal of The Electrochemical Society;1986-08-01
5. Ion-solid interactions during ion beam deposition of 74Ge and 30Si on Si at very low ion energies (0–200 eV range);Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1986-03