Ion beam deposition in materials research
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference40 articles.
1. A new Method of Positive Ray Analysis
2. Positive Ray Analysis of Lithium and Magnesium
3. Positive-Ray Analysis of Potassium, Calcium and Zinc
4. Electromagnetic Separation of Isotopes at Oak Ridge
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3. Spatial Energy Distributions of Sputtered Atoms and Reflected Particles during Kr+and Ar+Ion Beam Sputtering of Si and Ge;Japanese Journal of Applied Physics;1999-12-15
4. A low-energy ion beam system for studying energetic ion deposition on Silicon surfaces;Vacuum;1999-06
5. Synergetic effects in ion beam energy and substrate temperature during hyperthermal particle film deposition;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1998-05
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