Fabrication process of integrated inductors on flexible substrate for radio frequency and microwave applications-Reference-Cited by-同舟云学术

Fabrication process of integrated inductors on flexible substrate for radio frequency and microwave applications

Published:2020-03 Issue:2 Volume:38 Page:023204
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Freitas Wilson J.¹^ORCID,Piazzetta Maria H. O.²,Manera Leandro T.¹,Gobbi Ângelo L.²^ORCID

Affiliation:

1. Laboratório de Soluções em Eletrônica e RF (LSERF), DSIF, FEEC, Universidade Estadual de Campinas, Av. Albert Einstein, 400, Campinas, SP 13083-852, Brazil

2. Laboratório de Microfabricação (LMF), LNNano, CNPEM, Rua Giuseppe Maximo Scolfaro, 10000, Campinas, SP 13083-970, Brazil

Funder

CPqD

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5138202

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