1. Moscow Institute of Physics and Technology, 9 Institutskiy per., Dolgoprudny, Moscow Region 141700, Russian Federation and Molecular Electronics Research Institute,1st Zapadny Proezd 12/1, Zelenograd, Moscow 124460, Russian Federation
2. Institute of Physics and Technology RAS, Nakhimovsky Prospect 36/1, Moscow 117218, Russian Federation
3. Metrology and Development Department of Research and Education Center “Technological Center”, Moscow Technological University (MIREA), Prospect Vernadskogo 78, Moscow 119454, Russian Federation
4. Department of Microelectronics, North China University of Technology, No. 5 Jinyuanzhuang Road, Shijingshan, Beijing 100144, People's Republic of China