Ferroelectric Thin Films by Reactive Sputtering and High-Temperature Conversion
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Published:1973-03
Issue:2
Volume:10
Page:381-385
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ISSN:0022-5355
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Container-title:Journal of Vacuum Science and Technology
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language:en
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Short-container-title:Journal of Vacuum Science and Technology
Author:
Vogel S. F.,Barlow I. C.
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
6 articles.
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