Glow Discharge Sputter Deposition
Author:
Publisher
Elsevier
Reference498 articles.
1. Sputtering by Ion Bombardment
2. Impact Evaporation and Thin Film Growth in a Glow Discharge
3. ”Atomic and Ionic Impact Phenomena on Metal Surfaces.”;Kaminsky,1965
4. ”Basic Problems in Thin Film Physics”;Francombe,1966
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