Comparison of magnetron sputter deposition conditions in neon, argon, krypton, and xenon discharges-Reference-Cited by-同舟云学术

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Comparison of magnetron sputter deposition conditions in neon, argon, krypton, and xenon discharges

Published:1993-09 Issue:5 Volume:11 Page:2733-2741
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Petrov I.,Ivanov I.,Orlinov V.,Sundgren J.‐E.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.578634

Cited by 57 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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