Photovoltage versus microprobe sheet resistance measurements on ultrashallow structures-Reference-Cited by-同舟云学术

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Photovoltage versus microprobe sheet resistance measurements on ultrashallow structures

Published:2010-01 Issue:1 Volume:28 Page:C1C8-C1C14
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Clarysse Trudo,Moussa Alain,Parmentier Brigitte,Bogdanowicz Janusz,Vandervorst Wilfried,Bender Hugo,Pfeffer Markus,Schellenberger Martin,Nielsen Peter F.,Thorsteinsson Sune,Lin Rong,Petersen Dirch

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.3292637

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Vibration tolerance of micro-electrodes;Journal of Micromechanics and Microengineering;2018-06-06

2. Graphene Conductance Uniformity Mapping;Nano Letters;2012-09-07

3. Introduction;Photomodulated Optical Reflectance;2012

4. Three-way flexible cantilever probes for static contact;Journal of Micromechanics and Microengineering;2011-06-27

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