Performance characteristics of a dual focus x-ray alignment microscope
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Published:1995-11
Issue:6
Volume:13
Page:2660
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:
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Short-container-title:J. Vac. Sci. Technol. B
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
5 articles.
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4. Phase shift microscopes;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1998-11
5. High-resolution scanning microdensitometer;Review of Scientific Instruments;1997-08