Spatial dose control for fabrication of saw-tooth structures-Reference-Cited by-同舟云学术

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Spatial dose control for fabrication of saw-tooth structures

Published:2009 Issue:6 Volume:27 Page:2580
ISSN:1071-1023
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Lee S.-Y.,Jeon S. C.,Kim J. S.,Kim K. N.,Hyun M. S.,Yoo J. J.,Kim J. W.

Publisher

American Vacuum Society

Subject

Electrical and Electronic Engineering,Condensed Matter Physics

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Generalized performance optimization for massively-parallel electron-beam systems;Journal of Vacuum Science & Technology B;2023-06-26

2. Reduction of exposing time in massively-parallel E-beam systems;Journal of Vacuum Science & Technology B;2022-05

3. Effectiveness of multipass and multirow writing methods for massively parallel e-beam systems;Journal of Vacuum Science & Technology B;2020-11

4. Effects of abnormal beams on writing qualities in massively-parallel e-beam systems;Journal of Vacuum Science & Technology B;2019-11

5. Maskless EUV lithography, an alternative to e-beam;Journal of Micro/Nanolithography, MEMS, and MOEMS;2019-10-04

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