Microelectromechanical systems motion measurement and modal analysis based on Doppler interferometry-Reference-Cited by-同舟云学术

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Microelectromechanical systems motion measurement and modal analysis based on Doppler interferometry

Published:2009 Issue:3 Volume:27 Page:1251
ISSN:1071-1023
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Zhang G. X.,Zhong Y.,Hong X.,Leng C. L.

Publisher

American Vacuum Society

Subject

Electrical and Electronic Engineering,Condensed Matter Physics

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Nano-tribometer integrated with a nano-photonic displacement-sensing mechanism;Journal of Micromechanics and Microengineering;2011-05-04

2. Scanning grating based in-plane movement sensing;Journal of Micromechanics and Microengineering;2010-07-02

3. Modal Analysis for Connecting Rod of Reciprocating Mud Pump;Artificial Intelligence and Computational Intelligence;2009

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