Study of reaction and electrical properties at Ti/SiGe/Si(100) contacts for ultralarge scale integrated applications
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Published:1998-09
Issue:5
Volume:16
Page:2623
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:
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Short-container-title:J. Vac. Sci. Technol. B
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
21 articles.
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