Au-free recessed Ohmic contacts to AlGaN/GaN high electron mobility transistor: Study of etch chemistry and metal scheme-Reference-Cited by-同舟云学术

Au-free recessed Ohmic contacts to AlGaN/GaN high electron mobility transistor: Study of etch chemistry and metal scheme

Published:2020-05 Issue:3 Volume:38 Page:032207
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

S Niranjan¹^ORCID,Guiney Ivor²,Humphreys Colin J.³,Sen Prosenjit¹,Muralidharan Rangarajan¹,Nath Digbijoy N.¹

Affiliation:

1. Centre for Nano Science and Engineering, Indian Institute of Science, Bangalore 560012, India

2. Paragraf, West Newlands Industrial Park, Somersham PE28 3EB, United Kingdom

3. School of Engineering and Materials Science, Queen Mary University of London, London E1 4NS, United Kingdom

Funder

Semi-Conductor laboratory, Chandigarh, India

Ministry of Electronics and Information technology

Ministry of Human Resource Development

Department of Science and Technology, Ministry of Science and Technology, India

Indian Space Research Organisation

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5144509

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1. Ultra-low resistance Au-free V/Al/Ti/TiN ohmic contacts for AlGaN/GaN HEMTs;Applied Physics Letters;2023-11-13

2. AlGaN/GaN high electron mobility transistor for various sensing applications: A review;Micro and Nanostructures;2023-04

3. Self-Heating of Annealed Ti/Al/Ni/Au Contacts to Two-Dimensional Electron Gas in AlGaN/GaN Heterostructures;Applied Sciences;2022-11-01

4. Performance Comparison of Au-Based and Au-Free AlGaN/GaN HEMT on Silicon;IEEE Transactions on Electron Devices;2022-03

5. Au‐Free Ohmic Contacts and Their Impact on Sub‐Contact Charge Carrier Concentration in AlGaN/GaN Heterostructures;physica status solidi (b);2021-11-16