Ammonia plasma passivation of GaAs in downstream microwave and radio-frequency parallel plate plasma reactors-Reference-Cited by-同舟云学术

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Ammonia plasma passivation of GaAs in downstream microwave and radio-frequency parallel plate plasma reactors

Published:1993-03 Issue:2 Volume:11 Page:195
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:
Short-container-title:J. Vac. Sci. Technol. B

Author:

Aydil Eray S.

Publisher

American Vacuum Society

Subject

General Engineering

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