Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low Te plasma sources-Reference-Cited by-同舟云学术

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Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low Te plasma sources

Published:2016-01 Issue:1 Volume:34 Page:01B103
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Jagtiani Ashish V.,Miyazoe Hiroyuki,Chang Josephine,Farmer Damon B.,Engel Michael,Neumayer Deborah,Han Shu-Jen,Engelmann Sebastian U.,Boris David R.,Hernández Sandra C.,Lock Evgeniya H.,Walton Scott G.,Joseph Eric A.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4936622

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