Hafnium oxide thin film grown by ALD: An XPS study-Reference-Cited by-同舟云学术

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Hafnium oxide thin film grown by ALD: An XPS study

Published:2007-12 Issue:1 Volume:14 Page:34-40
ISSN:1055-5269
Container-title:Surface Science Spectra
language:en
Short-container-title:

Author:

Barreca Davide¹,Milanov Andrian²,Fischer Roland A.²,Devi Anjana²,Tondello Eugenio³

Affiliation:

1. ISTM-CNR and INSTM - Padova University, Department of Chemistry, 35131 Padova, Italy

2. Ruhr-University Bochum, Inorganic Materials Chemistry - Lehrstuhl für Anorganische Chemie II, D-44780 Bochum, Germany

3. Padova University and INSTM, Department of Chemistry, 35131 Padova, Italy

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

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