X‐ray diagnostics for electron cyclotron resonance processing plasmas
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.578247
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Ultrasoft x-ray emission from a linear ECR plasma source;Plasma Sources Science and Technology;2004-03-12
2. A Review of SiC Reactive Ion Etching in Fluorinated Plasmas;physica status solidi (b);1997-07
3. Electron Cyclotron Resonance Plasma Sources and Their Use in Plasma-Assisted Chemical Vapor Deposition of Thin Films;Physics of Thin Films;1994
4. X‐ray and vacuum ultraviolet imaging for electron cyclotron resonance processing plasmas;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1993-07
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