X‐ray and vacuum ultraviolet imaging for electron cyclotron resonance processing plasmas-Reference-Cited by-同舟云学术

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X‐ray and vacuum ultraviolet imaging for electron cyclotron resonance processing plasmas

Published:1993-07 Issue:4 Volume:11 Page:1186-1192
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Chew K. H.,Shohet J. L.,Castagna T. J.,Seaward K. L.,Mertz F. F.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.578491

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Ultrasoft x-ray emission from a linear ECR plasma source;Plasma Sources Science and Technology;2004-03-12

2. X-ray imaging during plasma-source ion implantation;Plasma Chemistry and Plasma Processing;1996-03

3. Electron Cyclotron Resonance Plasma Sources;High Density Plasma Sources;1995

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