Deep-ultraviolet–microelectromechanical systems stencils for high-throughput resistless patterning of mesoscopic structures-Reference-Cited by-同舟云学术

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Deep-ultraviolet–microelectromechanical systems stencils for high-throughput resistless patterning of mesoscopic structures

Published:2004 Issue:6 Volume:22 Page:3174
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

van den Boogaart M. A. F.,Kim G. M.,Pellens R.,van den Heuvel J.-P.,Brugger J.

Publisher

American Vacuum Society

Subject

General Engineering

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