Author:
Shao Lin,Thompson Phillip E.,van der Heide P. A. W.,Patel Sanjay,Chen Quak. Y.,Wang Xuemei,Chen Hui,Liu Jiarui,Chu Wei-Kan
Cited by
2 articles.
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1. MeV-Si ion irradiation effects on the electrical properties of HfO2 thin films on Si;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2006-08
2. Carrier illumination measurement of dopant lateral diffusion;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2005-08