Optimization of plasma density and radial uniformity of a point-cusp magnetic field applied capacitive plasma-Reference-Cited by-同舟云学术

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Optimization of plasma density and radial uniformity of a point-cusp magnetic field applied capacitive plasma

Published:2000-05 Issue:3 Volume:18 Page:823-829
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Wickramanayaka Sunil,Nakagawa Yukito,Sago Yasumi,Numasawa Yoichiro

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.582262

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. An experimental and computational investigation of discharge mode transitions in a partially magnetized radio frequency capacitively coupled oxygen discharge;Plasma Processes and Polymers;2024-07-03

2. Customized modulation on plasma uniformity by non-uniform magnetic field in capacitively coupled plasma;Plasma Science and Technology;2024-06-01

3. Enhancing plasma uniformity by employing non-uniform magnetic field modulation in capacitively coupled plasmas;Applied Physics Letters;2023-11-13

4. A comprehensive study on the electron cyclotron resonance effect in a weakly magnetized capacitively coupled RF plasma: experiment, simulation and modeling;Plasma Sources Science and Technology;2023-04-01

5. Outer Ring-Shaped Radio Frequency Magnetized Plasma Source for Target Utilization in Specific Area;IEEE Transactions on Plasma Science;2018-08

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