Atomic layer deposited single-crystal hexagonal perovskite YAlO3 epitaxially on GaAs(111)A-Reference-Cited by-同舟云学术

Atomic layer deposited single-crystal hexagonal perovskite YAlO3 epitaxially on GaAs(111)A

Published:2017-01 Issue:1 Volume:35 Page:01B123
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Young Lawrence Boyu,Cheng Chao-Kai,Lu Guan-Jie,Lin Keng-Yung,Lin Yen-Hsun,Wan Hsien-Wen,Li Mei-Yi¹,Cai Ren-Fong,Lo Shen-Chuan,Hsu Chia-Hung²,Kwo Jueinai³,Hong Minghwei⁴

Affiliation:

1. National Nano Device Laboratories, Hsinchu 30078, Taiwan

2. National Synchrotron Radiation Research Center, Hsinchu 30076, Taiwan

3. Department of Physics, National Tsing Hua University, Hsinchu 30013, Taiwan

4. Graduate Institute of Applied Physics and Department of Physics, National Taiwan University, Taipei 10617, Taiwan

Funder

Ministry of Science and Technology, Taiwan (MOST)

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4971989

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Atomic and Molecular Layer Deposition of Functional Thin Films Based on Rare Earth Elements;Advanced Materials Interfaces;2024-08-23

2. Epitaxy of High-Quality Single-Crystal Hexagonal Perovskite YAlO3 on GaAs(111)A Using Laminated Atomic Layer Deposition;Crystal Growth & Design;2019-03-14

3. Synthesis of Doped, Ternary, and Quaternary Materials by Atomic Layer Deposition: A Review;Chemistry of Materials;2018-12-10

4. Single-crystal hexagonal perovskite YAlO3 epitaxially on GaAs(111)A and (001) using atomic layer deposition;Microelectronic Engineering;2017-06