Measurement of resist response to heating-Reference-Cited by-同舟云学术

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Measurement of resist response to heating

Published:2003 Issue:1 Volume:21 Page:135
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Babin Sergey

Publisher

American Vacuum Society

Subject

General Engineering

Cited by 11 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Dependence of dose rate on the sensitivity of the resist under ultra-high flux extreme ultraviolet (EUV) pulse irradiation;Applied Physics Express;2021-05-12

2. Heating effect of the radiation chemistry of polyhydroxystyrene-type chemically amplified resists;Japanese Journal of Applied Physics;2020-08-01

3. Mechanism of resist heating effect in chemically amplified resist;Advances in Patterning Materials and Processes XXXVII;2020-03-23

4. Correction of resist heating effect on variable shaped beam mask writer;Journal of Micro/Nanolithography, MEMS, and MOEMS;2016-03-23

5. Influence of hydrogen silsesquioxane resist exposure temperature on ultrahigh resolution electron beam lithography;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2008-11

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