Heating effect of the radiation chemistry of polyhydroxystyrene-type chemically amplified resists
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
https://iopscience.iop.org/article/10.35848/1347-4065/aba7d7/pdf
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1. Resist heating effect in direct electron beam writing
2. Thermal distribution and the effect on resist sensitivity in electron-beam direct write
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