Fabrication of the nanofluidic channels type leak assembly based on the glass frit sealing method-Reference-Cited by-同舟云学术

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Fabrication of the nanofluidic channels type leak assembly based on the glass frit sealing method

Published:2019-09 Issue:5 Volume:37 Page:050603
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Zhou Wentian¹,Bi Hailin¹,Yu Zhenhua¹,Wang Xudi¹,Cheng Yongjun²,Xi Zhenhua²,Wei Wei³

Affiliation:

1. School of Mechanical Engineering, Hefei University of Technology, Hefei 230031, People’s Republic of China

2. Lanzhou Institute of Physics, Lanzhou 730000, People’s Republic of China

3. National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, People’s Republic of China

Funder

National Natural Science Foundation of China

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5119842

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Void Suppression in Glass Frit Bonding Via Three-Step Annealing Process;Micromachines;2022-11-29

2. New leak elements for helium based on single-layer graphene composite membranes;Journal of Vacuum Science & Technology B;2021-07

3. A flange-type standard leak element and its vacuum applications;Vacuum;2021-02

4. A gasket-type standard leak element using femtosecond laser micromachining;Vacuum;2020-10

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