Outgassing rate comparison of seven geometrically similar vacuum chambers of different materials and heat treatments-Reference-Cited by-同舟云学术

Outgassing rate comparison of seven geometrically similar vacuum chambers of different materials and heat treatments

Published:2021-03 Issue:2 Volume:39 Page:024201
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Fedchak James A.¹^ORCID,Scherschligt Julia K.¹^ORCID,Avdiaj Sefer²,Barker Daniel S.¹^ORCID,Eckel Stephen P.¹^ORCID,Bowers Ben³,O’Connell Scott³,Henderson Perry³

Affiliation:

1. National Institute of Standards and Technology (NIST), 100 Bureau Dr., Gaithersburg, Maryland 20899

2. Department of Physics, University of Prishtina, Mother Teresa av 3, Prishtina 10000, Kosova

3. Applied Vacuum Division, Anderson Dahlen, 6850 Sunwood Dr NW, Ramsey, Minnesota 55303

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

https://avs.scitation.org/doi/pdf/10.1116/6.0000657

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