Author:
Shih W.,Wang C.,Chiao S.,Chen L.,Wu N.,Batra T.,Kao J. C.,Wu O. K.
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Cited by
4 articles.
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1. Electrical properties of oxidized polycrystalline silicon as a gate insulator for n-type 4H-SiC MOS devices;Solid-State Electronics;2005-12
2. Rapid thermal oxidation of highly in situ phosphorus doped polysilicon thin films;Materials Science in Semiconductor Processing;1998-12
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