Scanning probe lithography using a cantilever with integrated transistor for on-chip control of the exposing current-Reference-Cited by-同舟云学术

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Scanning probe lithography using a cantilever with integrated transistor for on-chip control of the exposing current

Published:1999 Issue:6 Volume:17 Page:3256
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Wilder Kathryn,Quate Calvin F.

Publisher

American Vacuum Society

Subject

General Engineering

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Gated Si-Tip With On-Tip Integrated Gate-All-Around Field Effect Transistor for Actively Controlled Field Electron Emission;IEEE Electron Device Letters;2022-03

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3. Nanomanufacturing: A Perspective;ACS Nano;2016-02-22

4. Gold Nanoparticle Arrays Fabricated on a Silicon Substrate Covered with a Covalently Bonded Alkyl Monolayer by Electroless Plating Combined with Scanning Probe Anodization Lithography;The Journal of Physical Chemistry C;2009-05-05

5. Development of UHV dynamic nanostencil for surface patterning;Review of Scientific Instruments;2008-10

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