Observation of surface dissociation of low-energy polyatomic ions relevant to plasma processing-Reference-Cited by-同舟云学术

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Observation of surface dissociation of low-energy polyatomic ions relevant to plasma processing

Published:1998-01 Issue:1 Volume:16 Page:290-293
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Sugai H.,Mitsuoka Y.,Toyoda H.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.580984

Cited by 27 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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5. Collisions of Slow Polyatomic Ions with Surfaces: Dissociation and Chemical Reactions of C2H2+•, C2H3+, C2H4+•, C2H5+, and Their Deuterated Variants C2D2+• and C2D4+• on Room-Temperature and Heated Carbon Surfaces;The Journal of Physical Chemistry A;2005-10-22

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