1. Department of Electronic Engineering, National Changhua University of Education 1 , No. 2, Shi-Da Road, Changhua 50074, Taiwan
2. Department of Materials Science and Engineering, National United University 2 , No. 2, Lianda, Miaoli 36063, Taiwan
3. Taiwan Semiconductor Research Institute 3 , National Applied Research Laboratories, No. 26, Prosperity Road 1, Hsinchu Science Park, Hsinchu 300091, Taiwan