Hydrophobic Si nanopillar array coated with few-layer MoS2 films for surface-enhanced Raman scattering

Author:

Ko Tsung-Shine1ORCID,Chen Yen-Lun1,Shieh Jiann2ORCID,Chen Szu-Hung3,Syu Jing-Yang1,Chen Guan-Long1

Affiliation:

1. Department of Electronic Engineering, National Changhua University of Education 1 , No. 2, Shi-Da Road, Changhua 50074, Taiwan

2. Department of Materials Science and Engineering, National United University 2 , No. 2, Lianda, Miaoli 36063, Taiwan

3. Taiwan Semiconductor Research Institute 3 , National Applied Research Laboratories, No. 26, Prosperity Road 1, Hsinchu Science Park, Hsinchu 300091, Taiwan

Abstract

In this study, we covered Si nanopillar (NP) array with few-layer MoS2 films to convert their wettability characteristics from hydrophilic to hydrophobic for applications as a surface-enhanced Raman scattering (SERS) substrate. The Si NP array was fabricated using a semiconductor process. We then sulfurized and transferred MoO3 films coated onto the Si NP array to MoS2 films. The surface morphology and cross-sectional profile of the MoS2-coated Si NP array structure was examined using scanning electron microscopy and transmission electron microscopy. The SERS results indicate that the substrate exhibits a favorable enhancement factor of 1.76 × 103 and a detection limit of approximately 10−5M for Rhodamine 6G (R6G) utilized as the test molecule, attributed to the charge transfer (CT) mechanism at the interface between MoS2 and R6G. Contact angle measurements showed that the MoS2-coated Si NP array possesses a hydrophobic surface. Our results suggest that an MoS2-coated Si NP array with CT and hydrophobicity characteristics is extremely promising SERS substrates for SERS applications.

Funder

Ministry of Science and Technology, Taiwan

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

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