Fabrication of gated silicon field-emission cathodes for vacuum microelectronics and electron-beam applications
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Published:1993-03
Issue:2
Volume:11
Page:454
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:
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Short-container-title:J. Vac. Sci. Technol. B
Author:
Trujillo Johann T.
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
31 articles.
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