Study of amorphous lithium silicate thin films grown by atomic layer deposition-Reference-Cited by-同舟云学术

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Study of amorphous lithium silicate thin films grown by atomic layer deposition

Published:2012-01 Issue:1 Volume:30 Page:01A106
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Hämäläinen Jani,Munnik Frans,Hatanpää Timo,Holopainen Jani,Ritala Mikko,Leskelä Markku

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.3643349

Cited by 43 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. s-Block metal complexes of superbulky (^tBu₃Si)₂N⁻: a new weakly coordinating anion?;Chemical Science;2024

2. Emerging Atomic Layer Deposition for the Development of High-Performance Lithium-Ion Batteries;Electrochemical Energy Reviews;2023-07-12

3. Assessing the Environmental Impact of Atomic Layer Deposition (ALD) Processes and Pathways to Lower It;ACS Materials Au;2023-04-27

4. Plasma-enhanced atomic layer deposition of WO₃-SiO₂ films using a heteronuclear precursor;Journal of Vacuum Science & Technology A;2023-01

5. Plasma diagnostics and modeling of lithium-containing plasmas;Journal of Physics D: Applied Physics;2022-03-29

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